TY - JOUR A1 - Hildebrand, Jörg A1 - Hecht, Kerstin A1 - Bliedtner, Jens A1 - Müller, Hartmut T1 - Laser Beam Polishing of Quartz Glass Surfaces JF - Physics Procedia N2 - The laser beam is a small, flexible and fast polishing tool. With laser radiation it is possible to finish many outlines or geometries on quartz glass surfaces in the shortest possible time. It's a fact that the temperature developing while polishing determines the reachable surface smoothing and, as a negative result, causes material tensions. To find out which parameters are important for the laser polishing process and the surface roughness respectively and to estimate material tensions, temperature simulations and extensive polishing experiments took place. During these experiments starting and machining parameters were changed and temperatures were measured contact-free. KW - Laser KW - Quarzglas KW - Polieren KW - Berührungslose Messung KW - Temperatur KW - Laser; quartz glass; polishing; temperature; residual stress; simulation; contactless measurement Y1 - 2011 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:gbv:wim2-20170418-31366 UR - http://www.sciencedirect.com/science/article/pii/S1875389211001350 SP - 452 EP - 461 ER - TY - JOUR A1 - Hildebrand, Jörg A1 - Hecht, Kerstin A1 - Bliedtner, Jens A1 - Müller, Hartmut T1 - Advanced Analysis of Laser Beam Polishing of Quartz Glass Surfaces JF - Physics Procedia N2 - The laser beam is a small, flexible and fast polishing tool. With laser radiation it is possible to finish many outlines or geometries on quartz glass surfaces in the shortest possible time. It’s a fact that the temperature developing while polishing determines the reachable surface smoothing and, as a negative result, causes material tensions. To find out which parameters are important for the laser polishing process and the surface roughness respectively and to estimate material tensions, temperature simulations and extensive polishing experiments took place. During these experiments starting and machining parameters were changed and temperatures were measured contact-free. The accuracy of thermal and mechanical simulation was improved in the case of advanced FE-analysis. KW - Laser KW - Berührungslose Messung KW - Polieren KW - Empfindlichkeit KW - Quarzglas KW - laser; contactless measurement; quartz glass; polishing; temperature; residual stress; simulation; sensitivity Y1 - 2012 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:gbv:wim2-20170418-31372 UR - http://www.sciencedirect.com/science/article/pii/S1875389212025667 SP - 277 EP - 285 ER -