TY  - JOUR
A1  - Hildebrand, Jörg
A1  - Hecht, Kerstin
A1  - Bliedtner, Jens
A1  - Müller, Hartmut
T1  - Advanced Analysis of Laser Beam Polishing of Quartz Glass Surfaces
T2  - Physics Procedia
N2  - The laser beam is a small, flexible and fast polishing tool. With laser radiation it is possible to finish many outlines or geometries on quartz glass surfaces in the shortest possible time. It’s a fact that the temperature developing while polishing determines the reachable surface smoothing and, as a negative result, causes material tensions. To find out which parameters are important for the laser polishing process and the surface roughness respectively and to estimate material tensions, temperature simulations and extensive polishing experiments took place. During these experiments starting and machining parameters were changed and temperatures were measured  contact-free. The accuracy of thermal and mechanical simulation was improved in the case of advanced FE-analysis.
KW  - Laser
KW  - Berührungslose Messung
KW  - Polieren
KW  - Empfindlichkeit
KW  - Quarzglas
KW  - laser; contactless measurement; quartz glass; polishing; temperature; residual stress; simulation; sensitivity
Y1  - 2012
UR  - https://e-pub.uni-weimar.de/opus4/frontdoor/index/index/docId/3137
UR  - https://nbn-resolving.org/urn:nbn:de:gbv:wim2-20170418-31372
UR  - http://www.sciencedirect.com/science/article/pii/S1875389212025667
SP  - 277
EP  - 285
ER  -