@article{HildebrandHechtBliedtneretal.2012, author = {J{\"o}rg Hildebrand and Kerstin Hecht and Jens Bliedtner and Hartmut M{\"u}ller}, title = {Advanced Analysis of Laser Beam Polishing of Quartz Glass Surfaces}, journal = {Physics Procedia}, pages = {277 -- 285}, doi = {10.1016/j.phpro.2012.10.039}, url = {http://www.sciencedirect.com/science/article/pii/S1875389212025667}, year = {2012}, }